Measurement of quality factor of a micro-resonator in the time domain
Résumé
In this article, a quality factor (Q) measurement technique for MEMS resonators in the time domain has been proposed. Based on the principle of time-domain measurement, we have proposed a measurement architecture that is fully compatible with integrated circuit fabrication technology. The interest of this work is the potential to integrate the measurement circuit on the same chip as the resonator to monitor its performance during its life span and eventually prevent the system using the resonator from total failure in case of problems. An original design in a 0.35μm CMOS has been proposed. Within this design the major imperfections of functional blocks have been greatly attenuated. Moreover this design targets to increase the working frequency. Simulation results have shown that the working frequency achieved can be up to 200 kHz with a measurement accuracy of 0.08%.
Domaines
Sciences de l'ingénieur [physics]
Origine : Fichiers produits par l'(les) auteur(s)
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