Nonlinear regime operation for a high resolution vibrating beam UGS seismometer

Raphaël Levy (1) , Guillaume Papin (1) , Olivier Le Traon (1) , Denis Janiaud (1) , Jean Guérard (2)

1 ONERA - The French Aerospace Lab [Palaiseau]
2 DPHY, ONERA, Université Paris Saclay (COmUE) [Châtillon]

MEMS vibrating beam accelerometers use the variation of frequency of a vibrating beam attached to a proof mass to measure its applied acceleration. Considering inertial navigation applications, the beam is actuated in the linear regime to keep high eigen frequency stability. Concerning the new application of MEMS accelerometers as UGS seismometers, the bias stability is not important anymore and the important parameter is the resolution at integration time of 1 ms. It becomes then interesting to actuate the beam in the nonlinear regime. This paper presents a behavioral model of the vibrating beam accelerometer including the nonlinear terms. This model is validated by experimental measurements and phase noise in the nonlinear regime is simulated. The seismometer resolution is then calculated in the nonlinear regime and compared to other state of the art UGS seismometers.

Mots clés: ACCELEROMETER; SEISMOMETER; NONLINEAR RESONATOR; PHASE NOISE

Domaines: Physique Générale [physics.gen-ph]

Raphaël Levy, Guillaume Papin, Olivier Le Traon, Denis Janiaud, Jean Guérard. Nonlinear regime operation for a high resolution vibrating beam UGS seismometer. Analog Integrated Circuits and Signal Processing, 2015, 82 (3), pp.621-626. ⟨10.1007/s10470-014-0486-7⟩. ⟨hal-01228605⟩